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Flexible PolyCMUTs: Fabrication and Characterization of a Flexible Polymer-Based Capacitive Micromachined Ultrasonic Array for Conformal Ultrasonography

A.Omidvar, E. Cretu, R. Rohling, M. Cresswell, A. J. Hodgson

Flexible PolyCMUTs: Fabrication and Characterization of a Flexible Polymer-Based Capacitive Micromachined Ultrasonic Array for Conformal Ultrasonography

Advanced Materials Technologies; 8(5)

Vancouver, BC, Canada

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